Assignee
TARUTANI SHINJI
JP·2 granted patents·7 citations·filing 2008–2011
Top patents by PatentIndex Score
2 records- 0181US8088550B2Positive resist composition and pattern forming methodTARUTANI SHINJI·Filed 2008·Granted Jan 3, 2012·6 cites·19 claims
- 0265US8603733B2Pattern forming method, and resist composition, developer and rinsing solution used in the pattern forming methodTARUTANI SHINJI·Filed 2011·Granted Dec 10, 2013·1 cites·29 claims
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