Assignee
TADOKORO MASAHIDE
JP·4 granted patents·477 citations·filing 2007–2012
Top patents by PatentIndex Score
4 records- 0198US8927906B2Heating device, coating/developing system, heating method, coating/developing method, and recording medium having program for executing heating method or coating/developing methodTADOKORO MASAHIDE·Filed 2011·Granted Jan 6, 2015·469 cites·22 claims
- 0279US8242417B2Temperature control method of heat processing plate, computer storage medium, and temperature control apparatus of heat processing plateTADOKORO MASAHIDE·Filed 2007·Granted Aug 14, 2012·6 cites·15 claims
- 0370US8698052B2Temperature control method of heat processing plate, computer storage medium, and temperature control apparatus of heat processing plateTADOKORO MASAHIDE·Filed 2012·Granted Apr 15, 2014·2 cites·20 claims
- 0447US8308381B2Substrate processing method, computer-readable storage medium, and substrate processing systemTADOKORO MASAHIDE·Filed 2011·Granted Nov 13, 2012·0 cites·8 claims
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