Assignee

SUGAI HIDEO

JP·1 granted patent·1 pending application·11 citations·filing 2005–2008

Technology mixH01J2 H05H1

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2 records

0183US8136479B2Plasma treatment apparatus and plasma treatment methodSUGAI HIDEO·Filed 2005·Granted Mar 20, 2012·11 cites·11 claims
0246US2008105650A1Plasma processing device and plasma processing methodSUGAI HIDEO·Filed 2008·Application pending·0 cites

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