Assignee

STUART MARTIN NICHOLAS

GB·1 granted patent·2 citations·filing 2010–2010

Technology mixF04D1 G01M1 H01J1

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0165US8757987B2Vacuum pump for differentially pumping multiple chambersSTUART MARTIN NICHOLAS·Filed 2010·Granted Jun 24, 2014·2 cites·15 claims

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