Assignee
STRECK CHRISTOF
DE4 patents
Top patents by PatentIndex Score
US8222135B2Jul 17, 2012
Increasing reliability of copper-based metallization structures in a microstructure device by using aluminum nitride
STRECK CHRISTOF6 citations82
US8105943B2Jan 31, 2012
Enhancing structural integrity and defining critical dimensions of metallization systems of semiconductor devices by using ALD techniques
STRECK CHRISTOF3 citations61
US8124532B2Feb 28, 2012
Semiconductor device comprising a copper alloy as a barrier layer in a copper metallization layer
STRECK CHRISTOF0 citations49
US8609555B2Dec 17, 2013
Increased stability of a complex material stack in a semiconductor device by providing fluorine enriched interfaces
STRECK CHRISTOF0 citations44