Assignee

SPECTEL RES CORP

US·2 granted patents·214 citations·filing 2003–2004

Technology mixG01J1 G01N1 G02B1 G03F1

Top patents by PatentIndex Score

2 records

0196US7061623B2Interferometric back focal plane scatterometry with Koehler illuminationSPECTEL RES CORP·Filed 2003·Granted Jun 13, 2006·211 cites·34 claims
0251US7054071B2Mireau interference objective lensSPECTEL RES CORP·Filed 2004·Granted May 30, 2006·3 cites·2 claims

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