Assignee
SONE TAKASHI
JP·3 granted patents·5 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0172US8273258B2Fine pattern forming methodSONE TAKASHI·Filed 2010·Granted Sep 25, 2012·3 cites·14 claims
- 0270US8715520B2Substrate processing method and storage mediumSONE TAKASHI·Filed 2012·Granted May 6, 2014·2 cites·6 claims
- 0349US8329050B2Substrate processing methodSONE TAKASHI·Filed 2009·Granted Dec 11, 2012·0 cites·11 claims
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