Assignee
SNEH OFER
5 granted patents·2 pending applications·82 citations·filing 2004–2014
Top patents by PatentIndex Score
7 records- 0198US8083205B2Fail safe pneumatically actuated valve with fast time response and adjustable conductanceSNEH OFER·Filed 2010·Granted Dec 27, 2011·26 cites·15 claims
- 0292US8252116B2Perimeter partition-valve with protected seals and associated small size process chambers and multiple chamber systemsSNEH OFER·Filed 2010·Granted Aug 28, 2012·12 cites·7 claims
- 0390US7662233B2ALD apparatus and methodSNEH OFER·Filed 2004·Granted Feb 16, 2010·42 cites·11 claims
- 0483US9181097B2Apparatus and methods for safely providing hazardous reactantsSNEH OFER·Filed 2010·Granted Nov 10, 2015·2 cites·21 claims
- 0568US8673394B2Deposition method and apparatusSNEH OFER·Filed 2009·Granted Mar 18, 2014·0 cites·15 claims
- 0667US2014137802A1Deposition method and apparatusSNEH OFER·Filed 2014·Application pending·0 cites
- 0748US2012321910A1Methods and apparatus for atomic layer deposition on large area substratesSNEH OFER·Filed 2011·Application pending·0 cites
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