Assignee

SHIMBO MASAFUMI

JP·1 granted patent·78 citations·filing 1987–1987

Technology mixH10P1 Y10S1

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1 record

0183US4960720AMethod of growing compound semiconductor thin film using multichamber smoothing processSHIMBO MASAFUMI·Filed 1987·Granted Oct 2, 1990·78 cites·6 claims

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