Assignee
SHIBUYA HISAE
JP·8 granted patents·1 pending application·54 citations·filing 2007–2012
Top patents by PatentIndex Score
9 records- 0193US8682824B2Method and device for monitoring the state of a facilitySHIBUYA HISAE·Filed 2010·Granted Mar 25, 2014·18 cites·21 claims
- 0284US8437534B2Defect classification method and apparatus, and defect inspection apparatusSHIBUYA HISAE·Filed 2007·Granted May 7, 2013·18 cites·16 claims
- 0383US8116556B2Method and apparatus for analyzing defect data and a review systemSHIBUYA HISAE·Filed 2010·Granted Feb 14, 2012·6 cites·11 claims
- 0475US8139841B2Visual inspection method and apparatus and image analysis systemSHIBUYA HISAE·Filed 2008·Granted Mar 20, 2012·6 cites·9 claims
- 0571US8306312B2Method and apparatus for detecting pattern defectsSHIBUYA HISAE·Filed 2011·Granted Nov 6, 2012·2 cites·20 claims
- 0669US8086422B2Method for analyzing defect data and inspection apparatus and review systemSHIBUYA HISAE·Filed 2008·Granted Dec 27, 2011·1 cites·22 claims
- 0764US9659250B2Facility state monitoring method and device for sameSHIBUYA HISAE·Filed 2011·Granted May 23, 2017·3 cites·13 claims
- 0851US8620061B2Visual inspection method and apparatus and image analysis systemSHIBUYA HISAE·Filed 2012·Granted Dec 31, 2013·0 cites·6 claims
- 0941US2012271587A1Equipment status monitoring method, monitoring system, and monitoring programSHIBUYA HISAE·Filed 2010·Application pending·0 cites
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