Assignee
SHIBUTA MAKOTO
JP·4 granted patents·12 citations·filing 2005–2011
Top patents by PatentIndex Score
4 records- 0181US8102512B2Substrate holding device, exposure apparatus, and device manufacturing methodSHIBUTA MAKOTO·Filed 2005·Granted Jan 24, 2012·6 cites·11 claims
- 0278US9224632B2Substrate holding apparatus, exposure apparatus, and device fabricating methodSHIBUTA MAKOTO·Filed 2005·Granted Dec 29, 2015·5 cites·28 claims
- 0367US9341959B2Substrate holding device, exposure apparatus, and device manufacturing methodSHIBUTA MAKOTO·Filed 2011·Granted May 17, 2016·1 cites·17 claims
- 0455US8456609B2Exposure apparatus and device manufacturing methodSHIBUTA MAKOTO·Filed 2008·Granted Jun 4, 2013·0 cites·39 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →