Assignee

SEIDEL DIRK

DE·1 granted patent·6 citations·filing 2012–2012

Technology mixG03F1 G06F1 G06K1 G16Z1 G21K1

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0174US8694929B2Method and apparatus for the position determination of structures on a mask for microlithographySEIDEL DIRK·Filed 2012·Granted Apr 8, 2014·6 cites·16 claims

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