Assignee
SAPRE KEDAR
US·3 granted patents·695 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0198US8211808B2Silicon-selective dry etch for carbon-containing filmsSAPRE KEDAR·Filed 2009·Granted Jul 3, 2012·225 cites·30 claims
- 0297US8759223B2Double patterning etching processSAPRE KEDAR·Filed 2012·Granted Jun 24, 2014·467 cites·20 claims
- 0371US8617989B2Liner property improvementSAPRE KEDAR·Filed 2012·Granted Dec 31, 2013·3 cites·20 claims
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