Assignee

SAKAIDA YASUSHI

JP·1 granted patent·2 citations·filing 2012–2012

Technology mixC08G1 C08K1 C09D1 G03F1 H01L1 H10P1

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0162US9165781B2Composition for forming pattern reversal film and method for forming reversal patternSAKAIDA YASUSHI·Filed 2012·Granted Oct 20, 2015·2 cites·7 claims

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