Assignee

SACHSE MATTHIAS

AT·0 granted patents·1 pending application·0 citations·filing 2011–2011

Technology mixB81B1 B81C1 G01C1 G01P1 H01G1 H02N1

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1 record

0129US2013147313A1Method for producing a MEMS apparatus with a high aspect ratio, and converter and capacitorSACHSE MATTHIAS·Filed 2011·Application pending·0 cites

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