Assignee

RIEDO ELISA

US·1 granted patent·10 citations·filing 2010–2010

Technology mixB82Y1 G01Q1 G03C1 G03F1

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0182US8468611B2Thermochemical nanolithography components, systems, and methodsRIEDO ELISA·Filed 2010·Granted Jun 18, 2013·10 cites·20 claims

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