Assignee

RESNICK DOUGLAS J

US·1 granted patent·15 citations·filing 2011–2011

Technology mixB29C1 B82Y1 G03F1 H10P1

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0191US8556616B2Template having a varying thickness to facilitate expelling a gas positioned between a substrate and the templateRESNICK DOUGLAS J·Filed 2011·Granted Oct 15, 2013·15 cites·6 claims

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