Assignee
REIMER BERTHOLD
DE·1 granted patent·1 pending application·7 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0175US8580133B2Methods of controlling the etching of silicon nitride relative to silicon dioxideREIMER BERTHOLD·Filed 2011·Granted Nov 12, 2013·7 cites·18 claims
- 0232US2013126984A1Patterning of Sensitive Metal-Containing Layers With Superior Mask Material Adhesion by Providing a Modified Surface LayerREIMER BERTHOLD·Filed 2011·Application pending·0 cites
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