Assignee

PRUNNILA MIKA

FI·1 granted patent·36 citations·filing 2012–2012

Technology mixB81B1 B81C1 G06F1 H03H1

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0192US8558643B2Micromechanical device including N-type doping for providing temperature compensation and method of designing thereofPRUNNILA MIKA·Filed 2012·Granted Oct 15, 2013·36 cites·30 claims

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