Assignee
PLASMA THERM INC
US·4 granted patents·291 citations·filing 1984–1999
Top patents by PatentIndex Score
4 records- 0187US4584045AApparatus for conveying a semiconductor waferPLASMA THERM INC·Filed 1984·Granted Apr 22, 1986·114 cites·15 claims
- 0285US6071822AEtching process for producing substantially undercut free silicon on insulator structuresPLASMA THERM INC·Filed 1998·Granted Jun 6, 2000·93 cites·27 claims
- 0379US6258217B1Rotating magnet array and sputter sourcePLASMA THERM INC·Filed 1999·Granted Jul 10, 2001·40 cites·27 claims
- 0466US6417013B1Morphed processing of semiconductor devicesPLASMA THERM INC·Filed 1999·Granted Jul 9, 2002·44 cites·28 claims
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