Assignee

PIECHULLA ALEXANDER

DE·1 granted patent·7 citations·filing 2012–2012

Technology mixC30B1 F27B1 H10P1

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0171US8460468B2Device for doping, deposition or oxidation of semiconductor material at low pressurePIECHULLA ALEXANDER·Filed 2012·Granted Jun 11, 2013·7 cites·26 claims

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