Assignee
PFORR RAINER
DE·3 granted patents·2 pending applications·9 citations·filing 2006–2012
Top patents by PatentIndex Score
5 records- 0183US8539394B2Method and apparatus for minimizing overlay errors in lithographyPFORR RAINER·Filed 2012·Granted Sep 17, 2013·4 cites·20 claims
- 0271US8871409B2Lithographic targets for uniformity controlPFORR RAINER·Filed 2011·Granted Oct 28, 2014·3 cites·48 claims
- 0367US10157804B2Method and apparatus for determining a critical dimension variation of a photolithographic maskPFORR RAINER·Filed 2012·Granted Dec 18, 2018·2 cites·24 claims
- 0438US2007009816A1Method and system for photolithographyPFORR RAINER·Filed 2006·Application pending·0 cites
- 0535US2007287075A1Mask arrangement, optical projection system and method for obtaining grating parameters and absorption properties of a diffractive optical elementPFORR RAINER·Filed 2006·Application pending·0 cites
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