Assignee
PAN HENG
US·1 granted patent·1 pending application·5 citations·filing 2012–2013
Top patents by PatentIndex Score
2 records- 0179US9909925B2Apparatus and method to measure temperature of 3D semiconductor structures via laser diffractionPAN HENG·Filed 2012·Granted Mar 6, 2018·5 cites·9 claims
- 0245US2014034632A1Apparatus and method for selective oxidation at lower temperature using remote plasma sourcePAN HENG·Filed 2013·Application pending·0 cites
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