Assignee

OTA KAZUYA

JP·2 granted patents·4 citations·filing 1993–2012

Technology mixG03F2 G02B1 H10P1

Top patents by PatentIndex Score

2 records

0164US9715175B2Mask protection device, exposure apparatus, and method for manufacturing deviceOTA KAZUYA·Filed 2012·Granted Jul 25, 2017·1 cites·12 claims
0233USH1463HMethod for detecting positions of photomask and substrateOTA KAZUYA·Filed 1993·Granted Jul 4, 1995·3 cites·4 claims

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