Assignee
OGATA SHINICHI
JP·3 granted patents·9 citations·filing 2010–2011
Top patents by PatentIndex Score
3 records- 0177US8932952B2Method for polishing silicon wafer and polishing liquid thereforOGATA SHINICHI·Filed 2011·Granted Jan 13, 2015·6 cites·9 claims
- 0268US8728942B2Method for producing epitaxial silicon waferOGATA SHINICHI·Filed 2010·Granted May 20, 2014·3 cites·2 claims
- 0347US9707659B2Method and apparatus for polishing workpieceOGATA SHINICHI·Filed 2011·Granted Jul 18, 2017·0 cites·12 claims
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