Assignee
NISHIMOTO SHINYA
JP·6 granted patents·33 citations·filing 2006–2009
Top patents by PatentIndex Score
6 records- 0189US8057600B2Method and apparatus for an improved baffle plate in a plasma processing systemNISHIMOTO SHINYA·Filed 2007·Granted Nov 15, 2011·12 cites·26 claims
- 0283US8968512B2Temperature adjusting mechanism and semiconductor manufacturing apparatus using temperature adjusting mechanismNISHIMOTO SHINYA·Filed 2009·Granted Mar 3, 2015·9 cites·17 claims
- 0381US8485127B2Processing apparatusNISHIMOTO SHINYA·Filed 2006·Granted Jul 16, 2013·8 cites·20 claims
- 0470US8242405B2Microwave plasma processing apparatus and method for producing cooling jacketNISHIMOTO SHINYA·Filed 2009·Granted Aug 14, 2012·2 cites·8 claims
- 0570US8171880B2Microwave plasma processing apparatus and method of supplying microwaves using the apparatusNISHIMOTO SHINYA·Filed 2009·Granted May 8, 2012·2 cites·13 claims
- 0654US8327795B2Microwave plasma processing apparatus and method of supplying microwaves using the apparatusNISHIMOTO SHINYA·Filed 2009·Granted Dec 11, 2012·0 cites·9 claims
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