Assignee
NAKAMURA SHINGO
JP·4 granted patents·8 citations·filing 2007–2011
Top patents by PatentIndex Score
4 records- 0173US8759268B2Solution for removing residue after semiconductor dry process and method of removing the residue using the sameNAKAMURA SHINGO·Filed 2007·Granted Jun 24, 2014·4 cites·19 claims
- 0268US8822396B2Solution for removing residue after semiconductor dry process and method of removing the residue using the sameNAKAMURA SHINGO·Filed 2008·Granted Sep 2, 2014·3 cites·16 claims
- 0351US8964926B2Ex-core nuclear instrumentation systemNAKAMURA SHINGO·Filed 2011·Granted Feb 24, 2015·1 cites·4 claims
- 0448US8747564B2Solution for removal of residue after semiconductor dry process and residue removal method using sameNAKAMURA SHINGO·Filed 2009·Granted Jun 10, 2014·0 cites·19 claims
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