Assignee
NAGANO OSAMU
JP·2 granted patents·15 citations·filing 2008–2009
Top patents by PatentIndex Score
2 records- 0175US8090186B2Pattern inspection apparatus, pattern inspection method, and manufacturing method of semiconductor deviceNAGANO OSAMU·Filed 2009·Granted Jan 3, 2012·12 cites·20 claims
- 0257US8121390B2Pattern inspection method, pattern inspection apparatus and semiconductor device manufacturing methodNAGANO OSAMU·Filed 2008·Granted Feb 21, 2012·3 cites·19 claims
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