Assignee
MURAKI MASATO
JP·3 granted patents·1 pending application·140 citations·filing 1992–2012
Top patents by PatentIndex Score
4 records- 0195US5189494APosition detecting method and apparatusMURAKI MASATO·Filed 1992·Granted Feb 23, 1993·137 cites·51 claims
- 0274US8692218B2Charged particle beam exposure apparatusMURAKI MASATO·Filed 2007·Granted Apr 8, 2014·3 cites·10 claims
- 0354US8075361B2Electron source manufacturing methodMURAKI MASATO·Filed 2009·Granted Dec 13, 2011·0 cites·2 claims
- 0442US2012219914A1Drawing apparatus, drawing method and method of manufacturing articleMURAKI MASATO·Filed 2012·Application pending·0 cites
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