Assignee
MITSUI TADASHI
JP·9 granted patents·1 pending application·19 citations·filing 2006–2011
Top patents by PatentIndex Score
10 records- 0190US8532395B2Pattern inspection method and semiconductor device manufacturing methodMITSUI TADASHI·Filed 2011·Granted Sep 10, 2013·9 cites·15 claims
- 0273US8150177B2Image processing apparatus, image processing method, defect detection method, semiconductor device manufacturing method, and programMITSUI TADASHI·Filed 2011·Granted Apr 3, 2012·2 cites·6 claims
- 0366US8090192B2Pattern misalignment measurement method, program, and semiconductor device manufacturing methodMITSUI TADASHI·Filed 2007·Granted Jan 3, 2012·2 cites·18 claims
- 0464US8144338B2Pattern measurement apparatus and pattern measurement methodMITSUI TADASHI·Filed 2009·Granted Mar 27, 2012·4 cites·8 claims
- 0562US8086041B2Pattern evaluation method, pattern matching method and computer readable mediumMITSUI TADASHI·Filed 2010·Granted Dec 27, 2011·2 cites·6 claims
- 0650US8290242B2Defect inspection apparatus and defect inspection methodMITSUI TADASHI·Filed 2009·Granted Oct 16, 2012·0 cites·15 claims
- 0746US8144969B2Pattern evaluation method, computer-readable recording medium, and manufacturing method of semiconductor deviceMITSUI TADASHI·Filed 2009·Granted Mar 27, 2012·0 cites·20 claims
- 0845US9153419B2Pattern defect inspection using data based on secondary electron from patternMITSUI TADASHI·Filed 2011·Granted Oct 6, 2015·0 cites·22 claims
- 0944US8160349B2Pattern shape evaluation method, program, and semiconductor device manufacturing methodMITSUI TADASHI·Filed 2007·Granted Apr 17, 2012·0 cites·15 claims
- 1042US2006261268A1Pattern measuring system and semiconductor device manufacturing methodMITSUI TADASHI·Filed 2006·Application pending·0 cites
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