Assignee
MINAMIHABA GAKU
JP·3 granted patents·6 pending applications·6 citations·filing 2004–2012
Top patents by PatentIndex Score
9 records- 0176US8575030B2Semiconductor device manufacturing methodMINAMIHABA GAKU·Filed 2011·Granted Nov 5, 2013·4 cites·20 claims
- 0270US8337715B2CMP slurry for metallic film, polishing method and method of manufacturing semiconductor deviceMINAMIHABA GAKU·Filed 2010·Granted Dec 25, 2012·2 cites·12 claims
- 0351US8480915B2Method of manufacturing semiconductor deviceMINAMIHABA GAKU·Filed 2011·Granted Jul 9, 2013·0 cites·18 claims
- 0446US2009176372A1Chemical mechanical polishing slurry and semiconductor device manufacturing methodMINAMIHABA GAKU·Filed 2008·Application pending·0 cites
- 0544US2007293049A1Slurry for CMP of Cu film, polishing method and method for manufacturing semiconductor deviceMINAMIHABA GAKU·Filed 2007·Application pending·0 cites
- 0644US2009068840A1Polishing liquid and method for manufacturing semiconductor deviceMINAMIHABA GAKU·Filed 2008·Application pending·0 cites
- 0743US2007232068A1Slurry for touch-up CMP and method of manufacturing semiconductor deviceMINAMIHABA GAKU·Filed 2007·Application pending·0 cites
- 0839US2005205207A1Polishing apparatus and method for manufacturing semiconductor deviceMINAMIHABA GAKU·Filed 2004·Application pending·0 cites
- 0937US2013078784A1Cmp slurry and method for manufacturing semiconductor deviceMINAMIHABA GAKU·Filed 2012·Application pending·0 cites
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