Assignee

MICROSCIENCE INC

US·2 granted patents·172 citations·filing 1988–1989

Technology mixC23C1 C30B1 H01J1 H05B1 H05H1

Top patents by PatentIndex Score

2 records

0194US4952273APlasma generation in electron cyclotron resonanceMICROSCIENCE INC·Filed 1988·Granted Aug 28, 1990·131 cites·35 claims
0278US5093557ASubstrate heater and heating elementMICROSCIENCE INC·Filed 1989·Granted Mar 3, 1992·41 cites·23 claims

Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →