Assignee
METROLOGIX INC
US·2 granted patents·80 citations·filing 1991–1993
Top patents by PatentIndex Score
2 records- 0183US5493116ADetection system for precision measurements and high resolution inspection of high aspect ratio structures using particle beam devicesMETROLOGIX INC·Filed 1993·Granted Feb 20, 1996·57 cites·10 claims
- 0271US5155359AAtomic scale calibration systemMETROLOGIX INC·Filed 1991·Granted Oct 13, 1992·23 cites·15 claims
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