Assignee
MENG XIAOYING
CN·2 granted patents·0 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0136US8753930B2Method of manufacturing semiconductor device including ashing of photoresist with deuterium or tritium gasMENG XIAOYING·Filed 2011·Granted Jun 17, 2014·0 cites·9 claims
- 0233US9410233B2Method of manufacturing semiconductor device and waferMENG XIAOYING·Filed 2011·Granted Aug 9, 2016·0 cites·10 claims
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