Assignee
MATSUYAMA KENICHIROU
JP·3 granted patents·24 citations·filing 2010–2011
Top patents by PatentIndex Score
3 records- 0189US8560108B2Substrate processing apparatus and substrate processing methodMATSUYAMA KENICHIROU·Filed 2010·Granted Oct 15, 2013·17 cites·4 claims
- 0276US8448600B2Substrate processing apparatus, substrate processing method, and storage mediumMATSUYAMA KENICHIROU·Filed 2010·Granted May 28, 2013·5 cites·5 claims
- 0364US8588952B2Substrate processing system, substrate processing method and storage mediumMATSUYAMA KENICHIROU·Filed 2011·Granted Nov 19, 2013·2 cites·19 claims
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