Assignee
MASUMURA HISASHI
JP·4 granted patents·3 pending applications·18 citations·filing 2002–2012
Top patents by PatentIndex Score
7 records- 0177US8092281B2Polishing head and polishing apparatusMASUMURA HISASHI·Filed 2007·Granted Jan 10, 2012·6 cites·16 claims
- 0265US8268114B2Workpiece holder for polishing, workpiece polishing apparatus and polishing methodMASUMURA HISASHI·Filed 2002·Granted Sep 18, 2012·10 cites·8 claims
- 0357US8323075B2Polishing head, polishing apparatus and method for demounting workpieceMASUMURA HISASHI·Filed 2007·Granted Dec 4, 2012·2 cites·16 claims
- 0447US8636561B2Polishing head and polishing apparatusMASUMURA HISASHI·Filed 2009·Granted Jan 28, 2014·0 cites·10 claims
- 0540US2014101925A1Polishing head, polishing apparatus, and method for polishing workpieceMASUMURA HISASHI·Filed 2012·Application pending·0 cites
- 0640US2014113531A1Polishing head and polishing apparatusMASUMURA HISASHI·Filed 2012·Application pending·0 cites
- 0737US2012309175A1Vapor-phase growth semiconductor substrate support susceptor, epitaxial wafer manufacturing apparatus, and epitaxial wafer manufacturing methodMASUMURA HISASHI·Filed 2011·Application pending·0 cites
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