Assignee

MARMY PHILIPPE

CH·1 granted patent·5 citations·filing 2007–2007

Technology mixB81B1 B81C1 G04B1 G04D1 Y10T1

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0168US8501584B2Method of manufacturing multi-level, silicon, micromechanical parts and parts thereby obtainedMARMY PHILIPPE·Filed 2007·Granted Aug 6, 2013·5 cites·7 claims

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