Assignee
MA PAUL
US·2 granted patents·1 pending application·21 citations·filing 2006–2014
Top patents by PatentIndex Score
3 records- 0189US9032906B2Apparatus and process for plasma-enhanced atomic layer depositionMA PAUL·Filed 2007·Granted May 19, 2015·13 cites·20 claims
- 0286US9418890B2Method for tuning a deposition rate during an atomic layer deposition processMA PAUL·Filed 2014·Granted Aug 16, 2016·8 cites·25 claims
- 0341US2007077750A1Atomic layer deposition processes for ruthenium materialsMA PAUL·Filed 2006·Application pending·0 cites
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