Assignee
LIN CHENG-MING
TW·3 granted patents·7 citations·filing 2007–2010
Top patents by PatentIndex Score
3 records- 0180US8268541B2Mask and blank storage inner gasLIN CHENG-MING·Filed 2007·Granted Sep 18, 2012·6 cites·10 claims
- 0261US8792078B2Method and pellicle mounting apparatus for reducing pellicle induced distortionLIN CHENG-MING·Filed 2010·Granted Jul 29, 2014·1 cites·20 claims
- 0345US8158015B2Fitting methodology of etching times determination for a mask to provide critical dimension and phase controlLIN CHENG-MING·Filed 2007·Granted Apr 17, 2012·0 cites·18 claims
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