Assignee
LEE WONHAENG
KR·1 granted patent·1 pending application·3 citations·filing 2012–2012
Top patents by PatentIndex Score
2 records- 0166US8901459B2Substrate supporting units and substrate treating apparatuses including the sameLEE WONHAENG·Filed 2012·Granted Dec 2, 2014·3 cites·9 claims
- 0227US2013003249A1Electrostatic chucks, substrate treating apparatuses including the same, and substrate treating methodsLEE WONHAENG·Filed 2012·Application pending·0 cites
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