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KUWABARA HAJIME

JP3 patents

Top patents by PatentIndex Score

US8907567B2Dec 9, 2014

Plasma light source and plasma light generation method

KUWABARA HAJIME5 citations64

US8648536B2Feb 11, 2014

Plasma light source

KUWABARA HAJIME2 citations57

US9000402B2Apr 7, 2015

LPP EUV light source and method for producing the same

KUWABARA HAJIME2 citations54