Assignee
KUTHI ANDRAS
US·2 granted patents·1 pending application·2 citations·filing 2007–2014
Top patents by PatentIndex Score
3 records- 0163US8192576B2Methods of and apparatus for measuring and controlling wafer potential in pulsed RF bias processingKUTHI ANDRAS·Filed 2007·Granted Jun 5, 2012·2 cites·22 claims
- 0247US8303763B2Measuring and controlling wafer potential in pulsed RF bias processingKUTHI ANDRAS·Filed 2012·Granted Nov 6, 2012·0 cites·10 claims
- 0338US2014230770A1Transient plasma electrode for radical generationKUTHI ANDRAS·Filed 2014·Application pending·0 cites
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