Assignee
KOO ANN F
US·10 granted patents·212 citations·filing 1992–2000
Top patents by PatentIndex Score
10 records- 0179US6546820B1Method and apparatus for multifunction vacuum/nonvacuum annealing systemKOO ANN F·Filed 2000·Granted Apr 15, 2003·19 cites·22 claims
- 0279US5452078AMethod and apparatus for finding wafer index marks and centersKOO ANN F·Filed 1993·Granted Sep 19, 1995·70 cites·20 claims
- 0370US5708279AMethod and apparatus for measuring surface topographyKOO ANN F·Filed 1996·Granted Jan 13, 1998·27 cites·19 claims
- 0460US5270560AMethod and apparatus for measuring workpiece surface topographyKOO ANN F·Filed 1992·Granted Dec 14, 1993·31 cites·17 claims
- 0558USD450000SMultiple environment testing chamberKOO ANN F·Filed 2000·Granted Nov 6, 2001·11 cites·1 claims
- 0656US5523582AMethod and apparatus for measuring the curvature of wafers with a laser source selecting deviceKOO ANN F·Filed 1993·Granted Jun 4, 1996·23 cites·24 claims
- 0752US5696383AMethod and apparatus for measuring the curvature of wafers with beams of different wavelengthsKOO ANN F·Filed 1996·Granted Dec 9, 1997·15 cites·20 claims
- 0841US5917191AApparatus for measuring surface topographyKOO ANN F·Filed 1997·Granted Jun 29, 1999·6 cites·17 claims
- 0941US5369286AMethod and apparatus for measuring stress in a film applied to surface of a workpieceKOO ANN F·Filed 1994·Granted Nov 29, 1994·8 cites·20 claims
- 1031US5532499ABeam spot position detector having a detector moving mechanismKOO ANN F·Filed 1994·Granted Jul 2, 1996·2 cites·18 claims
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