Assignee
KITAMURA TADASHI
JP·4 granted patents·1 pending application·42 citations·filing 2009–2012
Top patents by PatentIndex Score
5 records- 0190US8150140B2System and method for a semiconductor lithographic process control using statistical information in defect identificationKITAMURA TADASHI·Filed 2010·Granted Apr 3, 2012·15 cites·17 claims
- 0282US8422761B2Defect and critical dimension analysis systems and methods for a semiconductor lithographic processKITAMURA TADASHI·Filed 2009·Granted Apr 16, 2013·12 cites·8 claims
- 0382US8285031B2Pattern inspection apparatus and methodKITAMURA TADASHI·Filed 2011·Granted Oct 9, 2012·11 cites·14 claims
- 0469US9189843B2Pattern inspection apparatus and methodKITAMURA TADASHI·Filed 2012·Granted Nov 17, 2015·4 cites·2 claims
- 0540US2012117520A1Systems And Methods For Inspecting And Controlling Integrated Circuit Fabrication Using A Calibrated Lithography SimulatorKITAMURA TADASHI·Filed 2011·Application pending·0 cites
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