Assignee

KIM IN-GI

KR·1 granted patent·5 citations·filing 2008–2008

Technology mixG03F1 H01J1 H10P1

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1 record

0173US8551288B2Apparatus and method for removing a photoresist structure from a substrateKIM IN-GI·Filed 2008·Granted Oct 8, 2013·5 cites·19 claims

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