Assignee
KASAI SHIGERU
JP·11 granted patents·9 pending applications·567 citations·filing 2003–2012
Top patents by PatentIndex Score
20 records- 0197US8246900B2Annealing apparatusKASAI SHIGERU·Filed 2007·Granted Aug 21, 2012·468 cites·18 claims
- 0295US8907259B2Microwave irradiation device and microwave irradiation methodKASAI SHIGERU·Filed 2011·Granted Dec 9, 2014·43 cites·14 claims
- 0392US8308898B2Tuner and microwave plasma sourceKASAI SHIGERU·Filed 2011·Granted Nov 13, 2012·19 cites·10 claims
- 0490US8794073B2Structure for attaching vibration sensor to storage deviceKASAI SHIGERU·Filed 2010·Granted Aug 5, 2014·12 cites·15 claims
- 0587US8128751B2Film-forming apparatusKASAI SHIGERU·Filed 2009·Granted Mar 6, 2012·11 cites·15 claims
- 0681US8897631B2Annealing apparatusKASAI SHIGERU·Filed 2009·Granted Nov 25, 2014·8 cites·29 claims
- 0766US9202731B2Liquid processing apparatus, liquid processing method, and recording medium having program for executing liquid processing method recorded thereinKASAI SHIGERU·Filed 2011·Granted Dec 1, 2015·2 cites·9 claims
- 0865US8891188B2Breakdown prediction device, breakdown prediction method, and breakdown prediction programKASAI SHIGERU·Filed 2011·Granted Nov 18, 2014·1 cites·7 claims
- 0964US9224623B2Microwave irradiation apparatusKASAI SHIGERU·Filed 2012·Granted Dec 29, 2015·2 cites·8 claims
- 1062US8163128B2Plasma processing apparatusKASAI SHIGERU·Filed 2008·Granted Apr 24, 2012·1 cites·11 claims
- 1153US2008280048A1Single wafer processing unitKASAI SHIGERU·Filed 2008·Application pending·0 cites
- 1253US2009151639A1Gas processing apparatus and gas processing methodKASAI SHIGERU·Filed 2008·Application pending·0 cites
- 1352US8440939B2Annealing deviceKASAI SHIGERU·Filed 2008·Granted May 14, 2013·0 cites·9 claims
- 1452US2007175396A1Film-forming apparatusKASAI SHIGERU·Filed 2007·Application pending·0 cites
- 1548US2012279944A1Annealing apparatusKASAI SHIGERU·Filed 2012·Application pending·0 cites
- 1645US2006137613A1Plasma generating apparatus, plasma generating method and remote plasma processing apparatusKASAI SHIGERU·Filed 2004·Application pending·0 cites
- 1743US2009267669A1Microwave Generating Apparatus and Microwave Generating MethodKASAI SHIGERU·Filed 2006·Application pending·0 cites
- 1842US2013113337A1Vibration sensorKASAI SHIGERU·Filed 2011·Application pending·0 cites
- 1938US2011273827A1Vibration-damping containing case for electronic device, the electronic device, and electronic apparatus having the electronic device mounted thereonKASAI SHIGERU·Filed 2010·Application pending·0 cites
- 2038US2007163713A1Gas supply system and processing systemKASAI SHIGERU·Filed 2003·Application pending·0 cites
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