Assignee
KAPPELHOF PIETER
NL·2 granted patents·0 citations·filing 2012–2012
Top patents by PatentIndex Score
2 records- 0132US8710461B2Assembly for providing an aligned stack of two or more modules and a lithography system or a microscopy system comprising such an assemblyKAPPELHOF PIETER·Filed 2012·Granted Apr 29, 2014·0 cites·28 claims
- 0228US9146480B2Support structure for wafer tableKAPPELHOF PIETER·Filed 2012·Granted Sep 29, 2015·0 cites·27 claims
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