Assignee
KAHLERT VOLKER
DE·2 granted patents·10 citations·filing 2009–2011
Technology mixH10W2
Top patents by PatentIndex Score
2 records- 0179US8432035B2Metal cap layer with enhanced etch resistivity for copper-based metal regions in semiconductor devicesKAHLERT VOLKER·Filed 2011·Granted Apr 30, 2013·5 cites·16 claims
- 0272US8084354B2Method of fabricating a metal cap layer with enhanced etch resistivity for copper-based metal regions in semiconductor devicesKAHLERT VOLKER·Filed 2009·Granted Dec 27, 2011·5 cites·20 claims
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