Assignee

ITOU KOUICHI

JP·2 granted patents·7 citations·filing 2010–2011

Technology mixH10P2 B25J1 Y10S1

Top patents by PatentIndex Score

2 records

0177US8630733B2Substrate processing apparatus and substrate transfer methodITOU KOUICHI·Filed 2010·Granted Jan 14, 2014·5 cites·17 claims
0265US8644981B2Substrate processing apparatus, substrate processing method and storage mediumITOU KOUICHI·Filed 2011·Granted Feb 4, 2014·2 cites·3 claims

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