Assignee
ISOBAYASHI ATSUNOBU
US·4 granted patents·38 citations·filing 2009–2012
Top patents by PatentIndex Score
4 records- 0193US8138097B1Method for processing semiconductor structure and device based on the sameISOBAYASHI ATSUNOBU·Filed 2010·Granted Mar 20, 2012·18 cites·19 claims
- 0289US8779590B2Semiconductor device and method of producing the sameISOBAYASHI ATSUNOBU·Filed 2012·Granted Jul 15, 2014·11 cites·10 claims
- 0371US8134234B2Application of Mn for damage restoration after etchbackISOBAYASHI ATSUNOBU·Filed 2009·Granted Mar 13, 2012·5 cites·29 claims
- 0469US8168528B2Restoration method using metal for better CD controllability and Cu filingISOBAYASHI ATSUNOBU·Filed 2009·Granted May 1, 2012·4 cites·27 claims
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